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Tel: (852) 23511967
Fax: (852) 23233617
Address: UNIT 1, 6/F.
WAH YIU IND. CENTRE,
30-32 AU PUI WAN ST., FO TAN,
SHATIN, HONG KONG
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▼
Download Area - Engineering Information |
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Table of Cleanroom Standard
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Class |
Number of Micrometer Size Particles per Cubic Feet/Meter |
Class |
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Federal Standard 209E |
0.5um |
0.5um |
0.3um |
0.2um |
0.1um |
ISO14644 |
| Metric |
English |
ft3 |
m3 |
m3 |
m3 |
m3 |
Metric |
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2 |
10 |
ISO1 |
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4 |
10 |
26 |
100 |
ISO2 |
| M1.5 |
1 |
|
35 |
106 |
265 |
1000 |
ISO3 |
| M2.5 |
10 |
10 |
353 |
1060 |
2650 |
10000 |
ISO4 |
| M3.4 |
100 |
100 |
3530 |
10600 |
26500 |
100000 |
ISO5 |
| M4.5 |
1000 |
1000 |
35300 |
106000 |
265000 |
1000000 |
ISO6 |
| M5.5 |
10000 |
10000 |
353000 |
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ISO7 |
| M6.5 |
100000 |
100000 |
3530000 |
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ISO8 |
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1000000 |
35300000 |
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ISO9 |
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